TITLE

Single-crystal diamond plate liftoff achieved by ion implantation and subsequent annealing

AUTHOR(S)
Parikh, N.R.; Hunn, J.D.
PUB. DATE
December 1992
SOURCE
Applied Physics Letters;12/28/1992, Vol. 61 Issue 26, p3124
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the use of ion implantation for removing lift thin sheets of diamond from diamond crystals. Creation of damaged diamond layer by carbon implantation; Effect of acid etching on diamond plate liftoff; Fabrication of crystalline diamond sheets using the homoepitaxial growth process.
ACCESSION #
4250667

 

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