Single-crystal diamond plate liftoff achieved by ion implantation and subsequent annealing

Parikh, N.R.; Hunn, J.D.
December 1992
Applied Physics Letters;12/28/1992, Vol. 61 Issue 26, p3124
Academic Journal
Describes the use of ion implantation for removing lift thin sheets of diamond from diamond crystals. Creation of damaged diamond layer by carbon implantation; Effect of acid etching on diamond plate liftoff; Fabrication of crystalline diamond sheets using the homoepitaxial growth process.


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