Investigation of the nucleation of oxygen precipitates in Czochralski silicon at an early stage

Zimmermann, H.; Falster, R.
June 1992
Applied Physics Letters;6/29/1992, Vol. 60 Issue 26, p3250
Academic Journal
Investigates the nucleation of oxygen precipitates in Czochralski silicon at an early stage. Measurement of vacancy profiles with platinum diffusion; Comparison of vacancy concentrations between Czochralski (CZ) material and float zone silicon; Relation of vacancy concentration with nucleation time and platinum diffusion time.


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