TITLE

Investigation of the nucleation of oxygen precipitates in Czochralski silicon at an early stage

AUTHOR(S)
Zimmermann, H.; Falster, R.
PUB. DATE
June 1992
SOURCE
Applied Physics Letters;6/29/1992, Vol. 60 Issue 26, p3250
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the nucleation of oxygen precipitates in Czochralski silicon at an early stage. Measurement of vacancy profiles with platinum diffusion; Comparison of vacancy concentrations between Czochralski (CZ) material and float zone silicon; Relation of vacancy concentration with nucleation time and platinum diffusion time.
ACCESSION #
4250626

 

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