Internal stress reduction by nitrogen incorporation in hard amorphous carbon thin films

Fraceschini, D.F.; Achete, C.A.
June 1992
Applied Physics Letters;6/29/1992, Vol. 60 Issue 26, p3229
Academic Journal
Explores internal stress reduction through hydrogen incorporation in hard amorphous carbon thin films. Acquisition of films with various nitrogen partial pressures; Usage of infrared spectroscopy, Raman scattering and nuclear techniques; Comparison of internal stress to hardness, hydrogen concentration and structure in amorphous carbon thin films.


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