TITLE

Internal stress reduction by nitrogen incorporation in hard amorphous carbon thin films

AUTHOR(S)
Fraceschini, D.F.; Achete, C.A.
PUB. DATE
June 1992
SOURCE
Applied Physics Letters;6/29/1992, Vol. 60 Issue 26, p3229
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Explores internal stress reduction through hydrogen incorporation in hard amorphous carbon thin films. Acquisition of films with various nitrogen partial pressures; Usage of infrared spectroscopy, Raman scattering and nuclear techniques; Comparison of internal stress to hardness, hydrogen concentration and structure in amorphous carbon thin films.
ACCESSION #
4250619

 

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