TITLE

Selective growth of Si crystals from the agglomerated Si seeds over amorphous substrates

AUTHOR(S)
Yamagata, K.; Yonehara, T.
PUB. DATE
November 1992
SOURCE
Applied Physics Letters;11/23/1992, Vol. 61 Issue 21, p2557
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Analyzes the selective growth of silicon (Si) crystals from the agglomerated silicon seeds on amorphous substrates. Use of low pressure chemical vapor deposition in depositing poly-Si substrates; Fabrication of electron devices inside a grown Si island on fused substrates; Variety of factors influencing agglomeration degree.
ACCESSION #
4250589

 

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