TITLE

Evaluation of surface roughness of technological InP substrates by in situ scanning tunneling

AUTHOR(S)
Robach, Y.; Phaner, M.
PUB. DATE
November 1992
SOURCE
Applied Physics Letters;11/23/1992, Vol. 61 Issue 21, p2551
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the use of in situ scanning tunneling microscopy imaging in evaluating the surface roughness of technological indium phosphide (InP) substrates. Effect of InP acidic solutions on free surface; Exposure of oxide-free InP surface to rapid air reoxidation; Influence of ultraviolet native oxide on InP topography.
ACCESSION #
4250587

 

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