Thermally stable ZnO films deposited on GaAs substrates with a SiO[sub 2] thin buffer layer

Hong Koo Kim; Mathur, Michelle
November 1992
Applied Physics Letters;11/23/1992, Vol. 61 Issue 21, p2524
Academic Journal
Evaluates the thermally stable zinc oxide (ZnO) films deposited on gallium arsenide substrates using a silicon dioxide (SiO[sub 2]) thin buffer layer. Utility of radiofrequency magnetron sputtering in depositing ZnO films and SiO[sub 2] buffer layers; Impact of postdeposition heat treatment on ZnO films; Benefits of postdeposition anneal treatment on ZnO films.


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