Micromachined vertical hall magnetic field sensor in standard complementary metal oxide

Paranjape, M.; Ristic, Lj.
June 1992
Applied Physics Letters;6/22/1992, Vol. 60 Issue 25, p3188
Academic Journal
Presents a vertical Hall magnetic field sensor that incorporates two important microsensor features. Fabrication and composition of the device; Production of the micromachined sensor; Exhibition of a linear response and no cross-resistivity between channels; Limitation of the electron motion.


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