TITLE

Micromachined vertical hall magnetic field sensor in standard complementary metal oxide

AUTHOR(S)
Paranjape, M.; Ristic, Lj.
PUB. DATE
June 1992
SOURCE
Applied Physics Letters;6/22/1992, Vol. 60 Issue 25, p3188
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a vertical Hall magnetic field sensor that incorporates two important microsensor features. Fabrication and composition of the device; Production of the micromachined sensor; Exhibition of a linear response and no cross-resistivity between channels; Limitation of the electron motion.
ACCESSION #
4250567

 

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