Dependence on doping type (p/n) of the water vapor oxidation of high-gap Al[sub x]Ga[sub 1-x]As

Kish, F.A.; Maranowski, S.A.
June 1992
Applied Physics Letters;6/22/1992, Vol. 60 Issue 25, p3165
Academic Journal
Examines the oxidation of high-gap Al[sub x]Ga[sub 1-x]As crystals of different doping types using scanning electron microscopy. Effect of the conductivity type on the oxidation rate; Information on the oxidation mechanism; Establishment of the oxide potential difference; Growth of crystals by metalorganic chemical vapor deposition.


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