Effect of oxygen on boron doping in chemical vapor deposition of diamond as deduced from

Ruan, J.; Kobashi, K.
April 1992
Applied Physics Letters;4/13/1992, Vol. 60 Issue 15, p1884
Academic Journal
Investigates the effect of oxygen on boron doping in diamond thin films. Growth of diamond film using microwave-plasma enhanced chemical vapor deposition; Application of cathodoluminescence for analysis of deposited film; Characterization of film by scanning electron microscopy and Raman scattering; Variation of boron concentration in film doped with oxygen.


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