Polarization independent narrow band Bragg reflection gratings made with silica-on-silicon

Adar, R.; Henry, C.H.
April 1992
Applied Physics Letters;4/13/1992, Vol. 60 Issue 15, p1779
Academic Journal
Describes a polarization independent narrow band Bragg reflection gratings. Fabrication of Bragg reflector with phosphorus dope silica on silicon waveguide; Use of glass doped with boron and phosphorus for filling the grating corrugation; Effect of thermal annealing on gratings; Elimination of strain induced by etching trenches.


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