TITLE

Self-aligned native-oxide ridge-geometry Al[sub x]Ga[sub 1-x]As-GaAs quantum well

AUTHOR(S)
Burton, R.S.; Schlesinger, T.E.
PUB. DATE
April 1992
SOURCE
Applied Physics Letters;4/13/1992, Vol. 60 Issue 15, p1776
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the fabrication of ridge geometry quantum well heterostructure laser arrays using self-aligned native oxide of Al[sub x]Ga[sub 1-x]As. Application of wet oxidation via water vapor; Dependence of oxide formation on pre-oxidation crystal environment; Characteristics of devices fabricated by oxidation process.
ACCESSION #
4250468

 

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