Self-aligned native-oxide ridge-geometry Al[sub x]Ga[sub 1-x]As-GaAs quantum well

Burton, R.S.; Schlesinger, T.E.
April 1992
Applied Physics Letters;4/13/1992, Vol. 60 Issue 15, p1776
Academic Journal
Describes the fabrication of ridge geometry quantum well heterostructure laser arrays using self-aligned native oxide of Al[sub x]Ga[sub 1-x]As. Application of wet oxidation via water vapor; Dependence of oxide formation on pre-oxidation crystal environment; Characteristics of devices fabricated by oxidation process.


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