Nucleation of Co silicide on H passivated Si(111)

Copel, M.; Tromp, R.M.
December 1994
Applied Physics Letters;12/12/1994, Vol. 65 Issue 24, p3102
Academic Journal
Examines the effect of hydrogen (H) passivation on the nucleation of cobalt on silicon(111). Nucleation sites for silicide formation of the H terminated surface; Dominance of sparse nonepitaxial island formations in the growth mode; Absence of silicon adatoms in the H passivated surfaces.


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