TITLE

Nucleation of Co silicide on H passivated Si(111)

AUTHOR(S)
Copel, M.; Tromp, R.M.
PUB. DATE
December 1994
SOURCE
Applied Physics Letters;12/12/1994, Vol. 65 Issue 24, p3102
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the effect of hydrogen (H) passivation on the nucleation of cobalt on silicon(111). Nucleation sites for silicide formation of the H terminated surface; Dominance of sparse nonepitaxial island formations in the growth mode; Absence of silicon adatoms in the H passivated surfaces.
ACCESSION #
4241438

 

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