Influence of hydrogen and oxygen plasma treatments on grain-boundary defects in polycrystalline

Nickel, N.H.; Yin, A.
December 1994
Applied Physics Letters;12/12/1994, Vol. 65 Issue 24, p3099
Academic Journal
Examines the influence of hydrogen, oxygen and helium plasma exposures on the grain-boundary defects of polycrystalline silicon. Passivation of silicon dangling-bonds by a remote hydrogen plasma; Decrease of spin density by an electron cyclotron resonance oxygen and helium plasma; Use of secondary ion mass spectrometry measurements.


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