TITLE

Electrical characteristics of epitaxial CeO[sub 2] on Si(111)

AUTHOR(S)
Tye, L.; El-Masry, N.A.
PUB. DATE
December 1994
SOURCE
Applied Physics Letters;12/12/1994, Vol. 65 Issue 24, p3081
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the electrical properties of epitaxial cerium dioxide thin films on silicon (111) substrates grown in ultrahigh vacuum in varying growth conditions and ex situ thermal treatments. Techniques used to characterize the properties; Effects of a post-annealing process in dry oxygen on the films; Reason for the high capacitance exhibited by the structure.
ACCESSION #
4241431

 

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