Electrical characteristics of epitaxial CeO[sub 2] on Si(111)

Tye, L.; El-Masry, N.A.
December 1994
Applied Physics Letters;12/12/1994, Vol. 65 Issue 24, p3081
Academic Journal
Examines the electrical properties of epitaxial cerium dioxide thin films on silicon (111) substrates grown in ultrahigh vacuum in varying growth conditions and ex situ thermal treatments. Techniques used to characterize the properties; Effects of a post-annealing process in dry oxygen on the films; Reason for the high capacitance exhibited by the structure.


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