TITLE

Fabrication of single-crystal diamond microcomponents

AUTHOR(S)
Hunn, John D.; Withrow, S.P.
PUB. DATE
December 1994
SOURCE
Applied Physics Letters;12/12/1994, Vol. 65 Issue 24, p3072
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a micromachining technique for fabricating single-crystal diamond microcomponents. Combination of thin diamond films lift-off from bulk diamonds and diamond engraving with a focused excimer laser methods; Structure of produced microcomponents; Efficiency of the method in producing diamond microstructures.
ACCESSION #
4241428

 

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