Fabrication of single-crystal diamond microcomponents

Hunn, John D.; Withrow, S.P.
December 1994
Applied Physics Letters;12/12/1994, Vol. 65 Issue 24, p3072
Academic Journal
Presents a micromachining technique for fabricating single-crystal diamond microcomponents. Combination of thin diamond films lift-off from bulk diamonds and diamond engraving with a focused excimer laser methods; Structure of produced microcomponents; Efficiency of the method in producing diamond microstructures.


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