TITLE

New crystalline structure for nanometer-sized Ge microcrystallites prepared by plasma enhanced

AUTHOR(S)
Jiangong Jiang; Kunji Chen
PUB. DATE
October 1994
SOURCE
Applied Physics Letters;10/3/1994, Vol. 65 Issue 14, p1799
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Explores the production of crystallized germanium films in a plasma enhanced chemical vapor deposition system. Decomposition of hydrogenated-diluted germanium hydrogen gas source using hydrogen plasma treatment; Analyses of the structure of the films; Presence of a crystalline structure in germanium microcrystallites.
ACCESSION #
4241398

 

Related Articles

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics