Subsurface hydrogenated amorphous silicon to muc-hydrogenated silicon transformation during

Yang, Y.H.; Katiyar, M.
October 1994
Applied Physics Letters;10/3/1994, Vol. 65 Issue 14, p1769
Academic Journal
Analyzes the microstructure of the muc-Si:H/a-Si:H interface deposited by reactive magnetron sputtering of a silicon target in (Ar+H[sub 2]. Use of in situ spectroscopic ellipsometry; Effect of increasing the hydrogen pressure; Result of the growth of muc-Si:H.


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