Nucleation and coalescence in hydrogenated amorphous silicon studied by scanning tunneling

Ikuta, Kazuyuki; Tanaka, Kazunobu
October 1994
Applied Physics Letters;10/3/1994, Vol. 65 Issue 14, p1760
Academic Journal
Examines nucleation and coalescence in the initial growth process of ultrathin hydrogenated amorphous silicon. Deposition of silicon on pyrolytic graphite structure; Use of vacuum scanning tunneling microscopy; Observation of subnanostructures on the surface of the thin film; Effect of the surface diffusion of the SiH[sub 3] precursors.


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