TITLE

Nucleation and coalescence in hydrogenated amorphous silicon studied by scanning tunneling

AUTHOR(S)
Ikuta, Kazuyuki; Tanaka, Kazunobu
PUB. DATE
October 1994
SOURCE
Applied Physics Letters;10/3/1994, Vol. 65 Issue 14, p1760
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines nucleation and coalescence in the initial growth process of ultrathin hydrogenated amorphous silicon. Deposition of silicon on pyrolytic graphite structure; Use of vacuum scanning tunneling microscopy; Observation of subnanostructures on the surface of the thin film; Effect of the surface diffusion of the SiH[sub 3] precursors.
ACCESSION #
4241385

 

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