TITLE

Intracavity laser spectroscopy of RF plasmas of methane and benzene used in depositing

AUTHOR(S)
Lipp, M.J.; O'Brien, J.J.
PUB. DATE
September 1994
SOURCE
Applied Physics Letters;9/5/1994, Vol. 65 Issue 10, p1317
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the radiofrequency plasmas of methane and benzene using intracavity laser spectroscopy. Advantages of using methane and benzene self-bias voltages and pressures; Density of hydrogen atoms across the discharge region; Implications for the impact fragmentation of hydrocarbon molecules during film growth.
ACCESSION #
4241372

 

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