TITLE

In situ microwave reflectivity measurements of the changes in surface recombination of

AUTHOR(S)
Neitzert, H.C.; Layadi, N.
PUB. DATE
September 1994
SOURCE
Applied Physics Letters;9/5/1994, Vol. 65 Issue 10, p1260
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the changes in surface recombination of crystalline silicon. Details on the high density defects produced by plasmas on crystal surface; Effects of the deposition of a silicon:helium film on the crystalline substrate; Comparison between the time resolved microwave conductivity amplitudes at longer times of plasma exposure.
ACCESSION #
4241353

 

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