In situ microwave reflectivity measurements of the changes in surface recombination of

Neitzert, H.C.; Layadi, N.
September 1994
Applied Physics Letters;9/5/1994, Vol. 65 Issue 10, p1260
Academic Journal
Investigates the changes in surface recombination of crystalline silicon. Details on the high density defects produced by plasmas on crystal surface; Effects of the deposition of a silicon:helium film on the crystalline substrate; Comparison between the time resolved microwave conductivity amplitudes at longer times of plasma exposure.


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