TITLE

Photolithographic micromolding of ceramics using plasma etched polyimide patterns

AUTHOR(S)
Bride, J.A.; Baskaran, S.
PUB. DATE
December 1993
SOURCE
Applied Physics Letters;12/13/1993, Vol. 63 Issue 24, p3379
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the photolithographic micromolding of ceramics using plasma etched polyimide patterns. Method for fabricating ceramics in micron and submicron range; Adherence of smaller lines to the polyimide mold; Applicability of the technique.
ACCESSION #
4241331

 

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