Photolithographic micromolding of ceramics using plasma etched polyimide patterns

Bride, J.A.; Baskaran, S.
December 1993
Applied Physics Letters;12/13/1993, Vol. 63 Issue 24, p3379
Academic Journal
Examines the photolithographic micromolding of ceramics using plasma etched polyimide patterns. Method for fabricating ceramics in micron and submicron range; Adherence of smaller lines to the polyimide mold; Applicability of the technique.


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