TITLE

Effect of diamond facet on the electrical properties of Pt/BF[sup +][sub 2] ion implanted

AUTHOR(S)
Cheng, Y.T.; Lin, S.J.
PUB. DATE
December 1993
SOURCE
Applied Physics Letters;12/13/1993, Vol. 63 Issue 24, p3344
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the effect of diamond facet on the electrical properties of platinum (Pt)/polycrystalline diamond films. Observation of ohmic behavior for diamond films with facet (111); Growth of diamond films on silicon (100) substrates by plasma enhanced chemical vapor deposition; Use of Raman spectroscopy and scanning electron microscopy.
ACCESSION #
4241319

 

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