TITLE

Ring-distribution of oxygen precipitates in Czochralski silicon revealed by low-temperature

AUTHOR(S)
Ono, Haruhiko; Ikarashi, Taeko
PUB. DATE
December 1993
SOURCE
Applied Physics Letters;12/13/1993, Vol. 63 Issue 24, p3303
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the inhomogeneous distribution of oxygen precipitates in a Czochralski grown silicon crystal. Types of oxygen precipitates; Use of Fourier-transform infrared absorption spectroscopy to map the oxygen precipitates along the wafer radius; Observation of oxygen precipitates at liquid-helium temperature.
ACCESSION #
4241304

 

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