Enhanced reflectivity of soft x-ray multilayer mirrors by reduction of Si atomic density

Schlatmann, R.; Keppel, A.
December 1993
Applied Physics Letters;12/13/1993, Vol. 63 Issue 24, p3297
Academic Journal
Examines the reflectivity of soft x-ray molybdenum/silicon multilayer mirrors by low energy hydrogen ion beam bombardment. Reduction of silicon atomic density; Increase of reflectivity coefficients in the soft x-ray range; Use of transmission electron microscopy and Rutherford backscattering spectrometry.


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