Detection of particle traps by spatially resolved optical emission spectroscopy over grooved

Dalvie, M.; Selwyn, G.S.
December 1993
Applied Physics Letters;12/13/1993, Vol. 63 Issue 24, p3279
Academic Journal
Examines the detection of particle traps by spatially resolved optical emission spectroscopy over grooved electrodes in radio frequency discharges. Dependence of electron excitation on sheath thickness; Observation of bright spot above the center of the groove; Correlation between bright spots and the location of trapped particles.


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