TITLE

Detection of particle traps by spatially resolved optical emission spectroscopy over grooved

AUTHOR(S)
Dalvie, M.; Selwyn, G.S.
PUB. DATE
December 1993
SOURCE
Applied Physics Letters;12/13/1993, Vol. 63 Issue 24, p3279
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the detection of particle traps by spatially resolved optical emission spectroscopy over grooved electrodes in radio frequency discharges. Dependence of electron excitation on sheath thickness; Observation of bright spot above the center of the groove; Correlation between bright spots and the location of trapped particles.
ACCESSION #
4241296

 

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