TITLE

Radiation-induced E' centers in H[sub 2]-annealed oxide films

AUTHOR(S)
Zvanut, M.E.; Stahlbush, R.E.
PUB. DATE
June 1992
SOURCE
Applied Physics Letters;6/15/1992, Vol. 60 Issue 24, p2989
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports the effect of preirradiation hydrogen annealing of thermal oxides on the concentration of radiation-induced E' centers. Use of electron paramagnetic resonance spectroscopy; Observation of an order-of-magnitude increase in oxides fabricated by thermal oxidation; Method of processing metal-oxide-semiconductor devices.
ACCESSION #
4241260

 

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