X-ray diffraction determination of interfacial roughness correlation in Si[sub x]Ge[sub 1-x]/Si

Phang, Y.H.; Savage, D.E.
June 1992
Applied Physics Letters;6/15/1992, Vol. 60 Issue 24, p2986
Academic Journal
Investigates the vertically correlated roughness in Si[sub x]Ge[sub 1-x]/Si and GaAs/Al[sub x]Ga[sub 1-x]As superlattice films. Separation of correlated from uncorrelated interfacial roughness; Determination of quantitative values of the lateral correlation length; Sensitivity of the distribution of diffracted intensity to disorder.


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