Room-temperature growth of AlN thin films by laser ablation

Seki, Kanekazu; Xiangqun Xu
May 1992
Applied Physics Letters;5/4/1992, Vol. 60 Issue 18, p2234
Academic Journal
Examines the growth of thin aluminum nitrate (AlN) films at room temperature on a variety of substrates using excimer laser ablation of compressed aluminum nitrogen powder. Observation of band gap as measured by ultra violet absorption; Use of electron and optical microscope to determine the film texture; Absorption characteristics of AlN.


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