TITLE

Fine line structures of ceramic films formed by patterning of metalorganic precursors using

AUTHOR(S)
Hung, L.S.; Zheng, L.R.
PUB. DATE
May 1992
SOURCE
Applied Physics Letters;5/4/1992, Vol. 60 Issue 18, p2210
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the fabrication of fine line structures of ceramic thin films by patterning of the metalorganic precursor films using photolithography. Development of trilevel structure with an outer resist layer and a silver delineated layer; Effect of ion irradiation on metal carboxylates and precursor film; Application of ion patterning technique.
ACCESSION #
4241212

 

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