Study of silicon-hydrogen bonds at an amorphous silicon/silicon nitride interface using infrared

Matsumoto, Tomotaka; Murata, Yuji
April 1992
Applied Physics Letters;4/20/1992, Vol. 60 Issue 16, p1942
Academic Journal
Investigates the silicon-hydrogen bonding structures at a hydrogenated amorphous silicon (a-Si:H)/silicon nitride (SiN) interface. Importance of the interface between a-Si:H and SiN to thin-film transistors; Ways to distinguish the behavior of hydrogen in an a-Si:H layer and SiN layer; Factors affecting the structure of the underlayer near the interface.


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