Atomic probe imaging of beta-SiC thin films grown on (100) Si

Steckl, A.J.; Mogren, S.A.
March 1992
Applied Physics Letters;3/23/1992, Vol. 60 Issue 12, p1495
Academic Journal
Investigates atomic-scale imaging on silicon carbide surfaces using scanning tunneling microscopy. Growth of films on silicon substrates; Measurement of the surface atomic spacing; Reason for the strong effect of the larger atomic spacing on the substrate.


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