TITLE

Atomic probe imaging of beta-SiC thin films grown on (100) Si

AUTHOR(S)
Steckl, A.J.; Mogren, S.A.
PUB. DATE
March 1992
SOURCE
Applied Physics Letters;3/23/1992, Vol. 60 Issue 12, p1495
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates atomic-scale imaging on silicon carbide surfaces using scanning tunneling microscopy. Growth of films on silicon substrates; Measurement of the surface atomic spacing; Reason for the strong effect of the larger atomic spacing on the substrate.
ACCESSION #
4241155

 

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