Distribution of radiation defects in submicron subsurface crystal layers

Chaplanov, Victor A.; Nefedov, Aleksey A.
March 1992
Applied Physics Letters;3/23/1992, Vol. 60 Issue 12, p1447
Academic Journal
Investigates the degradation of the structure of a silicon surface irradiated with high-energy electrons. Use of asymptotic Bragg diffraction; Description of the main radiation defects in the subsurface region; Impact of preliminary thermal oxidation in the prevention of radiation defect from accumulating.


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