TITLE

Distribution of radiation defects in submicron subsurface crystal layers

AUTHOR(S)
Chaplanov, Victor A.; Nefedov, Aleksey A.
PUB. DATE
March 1992
SOURCE
Applied Physics Letters;3/23/1992, Vol. 60 Issue 12, p1447
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the degradation of the structure of a silicon surface irradiated with high-energy electrons. Use of asymptotic Bragg diffraction; Description of the main radiation defects in the subsurface region; Impact of preliminary thermal oxidation in the prevention of radiation defect from accumulating.
ACCESSION #
4241138

 

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