TITLE

Transmission electron microscopy study of chemical-vapor-deposited diamond by a side-view method

AUTHOR(S)
Goto, Yasuyuki; Kurihara, Kazuaki
PUB. DATE
January 1992
SOURCE
Applied Physics Letters;1/13/1992, Vol. 60 Issue 2, p172
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the initial growth of synthetic diamond by direct current plasma-jet chemical vapor deposition with a transmission electron microscope by a side-view method. Observation of diamond particles and beta-silicon carbide on silicon (Si) substrate; Effect of plasma jet on the etching process of Si atoms; Elimination of the initial dents.
ACCESSION #
4241053

 

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