Transmission electron microscopy study of chemical-vapor-deposited diamond by a side-view method

Goto, Yasuyuki; Kurihara, Kazuaki
January 1992
Applied Physics Letters;1/13/1992, Vol. 60 Issue 2, p172
Academic Journal
Examines the initial growth of synthetic diamond by direct current plasma-jet chemical vapor deposition with a transmission electron microscope by a side-view method. Observation of diamond particles and beta-silicon carbide on silicon (Si) substrate; Effect of plasma jet on the etching process of Si atoms; Elimination of the initial dents.


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