TITLE

Examination of Si(100) surfaces treated by ultrapure water with 5 ppb dissolved oxygen

AUTHOR(S)
Kanaya, H.; Usuda, K.
PUB. DATE
July 1995
SOURCE
Applied Physics Letters;7/31/1995, Vol. 67 Issue 5, p682
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the silicon surfaces treated by ultrapure water with 5 parts per billion dissolved oxygen concentration. Examination through infrared spectroscopy and high energy electron diffraction; Dependence of surface morphology on pH value and amount of etching; Appearance of facets after rinsing.
ACCESSION #
4241025

 

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