TITLE

Preparation of PbTiO[sub 3] thin films by plasma-enhanced metalorganic chemical vapor deposition

AUTHOR(S)
Fujii, Eiji; Tomozawa, Atsushi
PUB. DATE
July 1994
SOURCE
Applied Physics Letters;7/18/1994, Vol. 65 Issue 3, p365
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the preparation of PbTiO[sub 3] thin films on glass substrate by plasma-enhanced metalorganic chemical vapor deposition. Use of lead dipivaloylmethane and titanium tetraisopropoxide as source materials; Observation of high deposition rate in the films; Details on the dielectric constant and columnar diameter of the films.
ACCESSION #
4240983

 

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