TITLE

Semi-insulating grown at low temperature by metalorganic chemical vapor deposition

AUTHOR(S)
Gardner, Nathan F.; Hartmann, Quesnell J.
PUB. DATE
July 1994
SOURCE
Applied Physics Letters;7/18/1994, Vol. 65 Issue 3, p359
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the growth of semi-insulating indium phosphide layers at low temperature (LT) by metalorganic chemical vapor deposition. Use of carbon tetrachloride as a dopant source; Application of double-crystal x-ray diffraction measurements to determine the composition of LT-grown materials; Absence of phosphorus precipitates in as-grown samples.
ACCESSION #
4240981

 

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