TITLE

Low temperature gettering of trace iron and copper by misfit dislocations in Si/Si(Ge) epitaxy

AUTHOR(S)
Lee, D.M.; Rozgonyi, G.A.
PUB. DATE
July 1994
SOURCE
Applied Physics Letters;7/18/1994, Vol. 65 Issue 3, p350
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the interfacial misfit dislocations of silicon/silicon germanium epitaxial heterostructures. Application of nonprobe x-ray spectroscopy for trace iron precipitate analysis; Identification of trace copper precipitate along the dislocation segment; Effectiveness of misfit dislocations as extrinsic gettering sites at very low-impurity levels.
ACCESSION #
4240978

 

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