Near-field scanning optical microscopy imaging of individual threading dislocations on relaxed

Hsu, J.W.P.; Fitzgerald, E.A.
July 1994
Applied Physics Letters;7/18/1994, Vol. 65 Issue 3, p344
Academic Journal
Examines the threading dislocations on relaxed Ge[sub x]Si[sub 1-x] films through simultaneous imaging of topography and photoresponse. Observation of shallow depressions in the surface morphology of threading dislocations; Comparison of photoresponse with the defect-free region; Application of near-field scanning optical microscopy to characterize the active defects.


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