TITLE

1/f noise and electromigration in aluminum films: The role of film microstructure and texture

AUTHOR(S)
Smith, R.G.; Biery, G.A.
PUB. DATE
July 1994
SOURCE
Applied Physics Letters;7/18/1994, Vol. 65 Issue 3, p315
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the role of crystallographic texture for the 1/f noise and electromigration of aluminum (Al) films. Measurement of the noise magnitude and logarithmic slope of Al films; Relationship between electromagnetic lifetime and volume fraction; Implication of grain boundaries as the major source of noise in Al films.
ACCESSION #
4240966

 

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