TITLE

Atomic structure of Ge-related point defects in Ge-incorporated oxide films

AUTHOR(S)
Zvanut, M.E.; Carlos, W.E.
PUB. DATE
November 1993
SOURCE
Applied Physics Letters;11/29/1993, Vol. 63 Issue 22, p3049
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the atomic structure of germanium-related point defects in germanium-incorporated oxide films. Use of electron paramagnetic resonance spectroscopy; Comparison between thin films and bulk samples; Relevance of the results to the production of silicon dioxide thin film wave guides.
ACCESSION #
4240931

 

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