TITLE

Iron detection in the part per quadrillion range in silicon using surface photovoltage and

AUTHOR(S)
Lagowski, J.; Edelman, P.
PUB. DATE
November 1993
SOURCE
Applied Physics Letters;11/29/1993, Vol. 63 Issue 22, p3043
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Evaluates a technique used in the detection of iron in p-type silicon. Use of surface photovoltage and photodissociation of iron-boron pairs; Factors limiting and enhancing the dissociation rate; Importance of approaching the detection limit close to one part per quadrillion in iron detection.
ACCESSION #
4240929

 

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