Surface passivation of GaAs using ArF excimer laser in a H[sub 2]S gas ambient

Yoshida, N.; Chichibu, S.
November 1993
Applied Physics Letters;11/29/1993, Vol. 63 Issue 22, p3035
Academic Journal
Examines the surface passivation of gallium arsenide using the combination of argon fluoride excimer laser with sulfuric acid gas. Removal of native oxides at the surface; Comparison between dry passivation and wet passivation process; Deposition of sulfur atoms on the surface.


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