TITLE

Surface passivation of GaAs using ArF excimer laser in a H[sub 2]S gas ambient

AUTHOR(S)
Yoshida, N.; Chichibu, S.
PUB. DATE
November 1993
SOURCE
Applied Physics Letters;11/29/1993, Vol. 63 Issue 22, p3035
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the surface passivation of gallium arsenide using the combination of argon fluoride excimer laser with sulfuric acid gas. Removal of native oxides at the surface; Comparison between dry passivation and wet passivation process; Deposition of sulfur atoms on the surface.
ACCESSION #
4240926

 

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