Evidence of rapid equilibration near the hot filament in diamond deposition

Ihara, M.; Miyamoto, K.
December 1993
Applied Physics Letters;12/20/1993, Vol. 63 Issue 25, p3524
Academic Journal
Measures the chemical composition of the gas phase during the diamond growth by a hot-filament method. Occurrence of equilibration near the hot filament; Insensitivity of the diamond process to the source hydrocarbon; Sensitivity to the filament-and-substrate configuration.


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