TITLE

Evidence of rapid equilibration near the hot filament in diamond deposition

AUTHOR(S)
Ihara, M.; Miyamoto, K.
PUB. DATE
December 1993
SOURCE
Applied Physics Letters;12/20/1993, Vol. 63 Issue 25, p3524
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Measures the chemical composition of the gas phase during the diamond growth by a hot-filament method. Occurrence of equilibration near the hot filament; Insensitivity of the diamond process to the source hydrocarbon; Sensitivity to the filament-and-substrate configuration.
ACCESSION #
4240908

 

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