Low energy ion implantation and electrochemical separation of diamond films

Marchywka, Mike; Pehrsson, Pehr E.
December 1993
Applied Physics Letters;12/20/1993, Vol. 63 Issue 25, p3521
Academic Journal
Examines the low energy ion implantation and electrochemical separation of diamond films. Implantation of carbon ion at 175 kiloelectron volts; Analysis of the delaminated films using optical microscopy; Effects of implantation and annealing on electrochemical etch.


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