TITLE

Excimer laser ablation and activation of SiO[sub x] and SiO[sub x]-ceramic couples for

AUTHOR(S)
Godbole, Mukund J.; Lowndes, Douglas H.
PUB. DATE
December 1993
SOURCE
Applied Physics Letters;12/20/1993, Vol. 63 Issue 25, p3449
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the ablation behavior of substoichiometric silicon oxide (SSO) using a xenon chloride pulse excimer laser. Deposition of SSO thin films on various ceramic substrates; Measurement of SSO absorption coefficient; Activation of ceramic surfaces for electronless copper deposition.
ACCESSION #
4240884

 

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