TITLE

Reflection high-energy electron diffraction observation of surface reaction triggered by pulsed

AUTHOR(S)
Hashimoto, Tadao; Yoshimoto, Masahiro
PUB. DATE
October 1993
SOURCE
Applied Physics Letters;10/11/1993, Vol. 63 Issue 15, p2097
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the surface reaction of B gallium phosphide (GaP) substrates triggered by pulsed laser irradiation. Absorption of triethylgallium on the substrate; Observation of PH[sub 3] flow rates from B GaP surface; Effects of Ga atoms on GaP substrate.
ACCESSION #
4240846

 

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