Reflection high-energy electron diffraction observation of surface reaction triggered by pulsed

Hashimoto, Tadao; Yoshimoto, Masahiro
October 1993
Applied Physics Letters;10/11/1993, Vol. 63 Issue 15, p2097
Academic Journal
Investigates the surface reaction of B gallium phosphide (GaP) substrates triggered by pulsed laser irradiation. Absorption of triethylgallium on the substrate; Observation of PH[sub 3] flow rates from B GaP surface; Effects of Ga atoms on GaP substrate.


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