Investigation of the recombination activity of misfit dislocations in Si/SiGe epilayers by

Higgs, V.; Kittler, M.
October 1993
Applied Physics Letters;10/11/1993, Vol. 63 Issue 15, p2085
Academic Journal
Investigates the electron beam-induced current technique (EBIC) and cathodoluminescence (CL) spectroscopy of misfit dislocations in silicon (Si)/Si germanide structures. Effects of excitons on CL intensity; Observation of nonuniform contrast in structures by EBIC measurements; Detection of misfit dislocations in Ni-contaminated sample by CL image.


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