TITLE

Suppression of threading dislocation generation in highly lattice mismatched heteroepitaxies by

AUTHOR(S)
Kawai, T.; Yonezu, H.
PUB. DATE
October 1993
SOURCE
Applied Physics Letters;10/11/1993, Vol. 63 Issue 15, p2067
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the reduction of threading dislocation density in lattice mismatched heteroepitaxies of indium gallium arsenide (InGaAs)/GaAs systems. Growth of GaAs buffer layer by molecular beam epitaxy; Observation of the reflection high-energy electron diffraction patterns; Dependence of threading dislocations on growth mode.
ACCESSION #
4240836

 

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