Influence of the oxygen stoichiometry on the structural and optical properties of reactively

Bellotto, M.; Caridi, A.
October 1993
Applied Physics Letters;10/11/1993, Vol. 63 Issue 15, p2056
Academic Journal
Examines the stoichiometry of the optical properties in zirconium oxide (ZrO[sub 2]) films. Determination of film stoichiometry deposited on aluminum substrate; Formation of transparent films by oxygen partial pressure; Relationship between optical properties and film stoichiometry.


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