TITLE

Effects of grown-in stress on the metastable solid solubility limits in Sb implanted

AUTHOR(S)
Hong, Stella Q.; Hong, Q.Z.
PUB. DATE
October 1993
SOURCE
Applied Physics Letters;10/11/1993, Vol. 63 Issue 15, p2053
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the solid phase epitaxy and solubility limits of implanted antimony (Sb) atoms in Ge[sub 0.1]Si[sub 0.9] thin films. Regrowth behavior of Ge-Si alloys; Transmission electron microscopy images of the Ge-Si samples; Formation of Sb solid solutions during solid phase epitaxy growth.
ACCESSION #
4240831

 

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